FEEDER MEMBER AND WAFER PLACEMENT TABLE

FEEDER MEMBER AND WAFER PLACEMENT TABLE

A feeder member is used to supply electricity to an electrode embedded in a ceramic base. The feeder member includes an electrode-side terminal that is made of a high-melting-point metal containing material and joined to the electrode, an intermediate member that is made of a Cu containing material...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MINAMI, Tomoyuki, USAMI, Taro, INOUE, Seiya, KUNO, Tatsuya
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
CURRENT COLLECTORS
ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
GENERATION
LINE CONNECTORS
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Beschreibung
Zusammenfassung:A feeder member is used to supply electricity to an electrode embedded in a ceramic base. The feeder member includes an electrode-side terminal that is made of a high-melting-point metal containing material and joined to the electrode, an intermediate member that is made of a Cu containing material and directly joined to the electrode-side terminal without using a brazing material, a cable support member that is made of a Cu containing material and joined to the intermediate member, and a cable that is made of a Cu containing material and that has one end whose end surface is welded to the cable support member.