SEMICONDUCTOR DEVICE INCLUDING A CAPACITOR
A capacitor structure for a power semiconductor device includes a semiconductor substrate, an isolation insulating layer having a ring-shape and including an outer periphery and an inner periphery defining an opening region, a first electrode disposed on the isolation insulating layer, a dielectric...
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| creator | CHUNG, Chiu-Hua CHEN, Hong-Yang LIN, Hung-Chou WU, Kuo-Ming LIN, Tian Sheng CHIU, Yi-Cheng CHEN, Yi-Min |
| description | A capacitor structure for a power semiconductor device includes a semiconductor substrate, an isolation insulating layer having a ring-shape and including an outer periphery and an inner periphery defining an opening region, a first electrode disposed on the isolation insulating layer, a dielectric layer disposed on the first electrode, and a second electrode disposed on the dielectric layer. |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
| title | SEMICONDUCTOR DEVICE INCLUDING A CAPACITOR |
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