ELECTROSTATIC DISCHARGE USING BACKSIDE POWER DISTRIBUTION NETWORK

ELECTROSTATIC DISCHARGE USING BACKSIDE POWER DISTRIBUTION NETWORK

An ESD protection device is disclosed that uses a BSPDN to provide potential(s) to the ESD protection device. The utilization of the BSPDN reduces resistance drops induced during high current ESD events, which results in robust ESD protection. The utilization of the BSPDN also reduces the footprint...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Anderson, Brent A, POLOMOFF, Nicholas Alexander, Xie, Ruilong, Arnold, John Christopher, Hook, Terence, Chou, Anthony I
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
GENERATION
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:An ESD protection device is disclosed that uses a BSPDN to provide potential(s) to the ESD protection device. The utilization of the BSPDN reduces resistance drops induced during high current ESD events, which results in robust ESD protection. The utilization of the BSPDN also reduces the footprint area of the ESD protection circuit relative to known ESD protection devices that utilize respective frontside contacts to VDD, VSS, and I/O. Further, the disclosed ESD protection circuit may utilize the same or similar structures as that are used by microdevices (e.g., transistors, or the like) within the semiconductor IC device, which may decrease fabrication complexities thereof.