COVER DEVICE FOR PHOTORESIST CONTAINER

A cover device includes a guide module which is coupled to an upper end portion of the container, has an upward inclination at a predetermined angle, has an inclined protruding unit that protrudes, and is formed with a communication port through which the inside and the outside of the housing space...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: JANG, SE HYUN, KIM, KWON SU, HONG, SOON SUK, MOON, SUN SEOCK
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A cover device includes a guide module which is coupled to an upper end portion of the container, has an upward inclination at a predetermined angle, has an inclined protruding unit that protrudes, and is formed with a communication port through which the inside and the outside of the housing space communicate; a discharge module in which one side along a longitudinal direction penetrates the communication port and is disposed inside the container, the other side is exposed to the outside to form a discharge port, and an intermediate portion along the longitudinal direction has an expansion fixing unit which is expanded, at least a part of periphery is in contact with an inner surface of the communication port, and is inserted and fixed; and a fixing module which is fixedly coupled to the inclined protruding unit in a state in which the other part of the discharge module penetrates.