IMPROVE MEMORY WINDOW OF MFM MOSFET FOR SMALL CELL SIZE

In some embodiments, the present disclosure relates to an integrated chip. The integrated chip includes a first interconnect dielectric layer over a substrate and surrounding a first interconnect. A second interconnect dielectric layer is over the first interconnect dielectric layer and surrounds at...

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Bibliographische Detailangaben
Hauptverfasser: Trinh, Hai-Dang, Wei, Yi Yang, Lee, Bi-Shen, Jiang, Fa-Shen, Kuang, Hsun-Chung, Tsai, Cheng-Yuan
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:In some embodiments, the present disclosure relates to an integrated chip. The integrated chip includes a first interconnect dielectric layer over a substrate and surrounding a first interconnect. A second interconnect dielectric layer is over the first interconnect dielectric layer and surrounds at least a part of a second interconnect. A bottom electrode is over the substrate, a top electrode is over the bottom electrode, and a ferroelectric layer is between the bottom electrode and the top electrode. The ferroelectric layer includes a lower horizontally extending portion, an upper horizontally extending portion arranged above the lower horizontally extending portion, and a vertically extending portion coupling the lower horizontally extending portion and the upper horizontally extending portion. The vertically extending portion extends through the first interconnect dielectric layer and the second interconnect dielectric layer.