METHOD AND APPARATUS FOR REAL TIME OPTIMIZATION OF A MICROWAVE PLASMA

A method of real time optimization of a microwave plasma includes adjusting in real time an injection angle of a swirl gas flow of the microwave plasma, the magnitude of the swirl gas flow of the microwave plasma, or the microwave power applied to the microwave plasma.

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Bibliographische Detailangaben
Hauptverfasser:	SHANG, Zongren, KOZLOWSKI, Michael
Format:	Patent
Sprache:	eng
Schlagworte:	CLADDING OR PLATING BY SOLDERING OR WELDING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS SOLDERING OR UNSOLDERING TRANSPORTING WELDING WORKING BY LASER BEAM
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Beschreibung
Zusammenfassung:	A method of real time optimization of a microwave plasma includes adjusting in real time an injection angle of a swirl gas flow of the microwave plasma, the magnitude of the swirl gas flow of the microwave plasma, or the microwave power applied to the microwave plasma.