BULK ACOUSTIC RESONATOR

A bulk acoustic resonator includes a resonance portion including a first electrode, a piezoelectric layer disposed on the first electrode along a height direction, and a second electrode disposed on the piezoelectric layer along the height direction. The resonance portion includes an overlapping reg...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	RYOU, Jeong Hoon, KIM, Jong Woon, JEONG, Daehun, KIM, Jeonga, KIM, Sungwook, HAN, Won, YOUM, Jung-Eun, SON, Sang Uk, HAN, Sangheon, LEE, Hwasun
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRONIC CIRCUITRY ELECTRICITY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS RESONATORS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	A bulk acoustic resonator includes a resonance portion including a first electrode, a piezoelectric layer disposed on the first electrode along a height direction, and a second electrode disposed on the piezoelectric layer along the height direction. The resonance portion includes an overlapping region in which the first electrode, the piezoelectric layer, and the second electrode overlap each other along the height direction. The overlapping region includes a central portion and an edge portion disposed outside the central portion, and including a first edge portion and a second edge portion. A height of the second electrode of the first edge portion and a height of the second electrode of the second edge portion are lower than a height of the second electrode of the central portion along the height direction, and are different from each other along the height direction.