SEMICONDUCTOR STRUCTURES AND FABRICATION METHOD THEREOF, MEMORY DEVICE AND MEMORY SYSTEM

Examples of the present disclosure propose a semiconductor structure and a fabrication method thereof, a memory device, and a memory system. The semiconductor structure includes at least one deck structure. The fabrication method of the deck structure includes: providing a first stack structure in w...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Wen, Min, Pan, Zhen, Zhou, Chengbao
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Examples of the present disclosure propose a semiconductor structure and a fabrication method thereof, a memory device, and a memory system. The semiconductor structure includes at least one deck structure. The fabrication method of the deck structure includes: providing a first stack structure in which a peripheral circuit is disposed; forming a first contact and a second contact at least penetrating through the first stack structure; providing a second stack structure in which a memory cell array is disposed; forming a third contact and a fourth contact penetrating through the second stack structure; stacking and bonding the first stack structure and the second stack structure along a first direction to form the deck structure, wherein the first contact is connected with the third contact by bonding to form a first interconnection structure, and the second contact is connected with the fourth contact by bonding to form a second interconnection structure.