SUBSTRATE TRANSFERRING APPARATUS

A substrate transferring apparatus includes a support plate including an upper surface on which a substrate is configured to be seated, and a vacuum pad detachably coupled to the support plate and configured to vacuum suction the substrate to fix the substrate on the upper surface of the support pla...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Kang, Seong-Eun, Lee, Jeung Hee, Kim, Kyung Beom, Ryu, Sung Yoon, Lee, Yong Kyu, Lee, Ju Hyun, Choi, Sung-Il, Park, Mi Ra, Cho, Nam Young
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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