SUBSTRATE TRANSFERRING APPARATUS

SUBSTRATE TRANSFERRING APPARATUS

A substrate transferring apparatus includes a support plate including an upper surface on which a substrate is configured to be seated, and a vacuum pad detachably coupled to the support plate and configured to vacuum suction the substrate to fix the substrate on the upper surface of the support pla...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Kang, Seong-Eun, Lee, Jeung Hee, Kim, Kyung Beom, Ryu, Sung Yoon, Lee, Yong Kyu, Lee, Ju Hyun, Choi, Sung-Il, Park, Mi Ra, Cho, Nam Young
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A substrate transferring apparatus includes a support plate including an upper surface on which a substrate is configured to be seated, and a vacuum pad detachably coupled to the support plate and configured to vacuum suction the substrate to fix the substrate on the upper surface of the support plate, wherein the vacuum pad includes a suction area and a support protrusion surrounding the suction area, an upper surface of the support protrusion is at a higher vertical level than an upper surface of the suction area to support the substrate, and the upper surface of the support protrusion is inclined relative to horizontal.