VAPORIZER
A vaporizer includes a liquid material introduction, a vaporized material discharge port, a vaporizer body, and a heater. The vaporizer body includes therein a vaporization unit extending from the liquid material introduction port to the vaporized material discharge port. A passage into which a liqu...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A vaporizer includes a liquid material introduction, a vaporized material discharge port, a vaporizer body, and a heater. The vaporizer body includes therein a vaporization unit extending from the liquid material introduction port to the vaporized material discharge port. A passage into which a liquid material flows is formed in the vaporization unit. The passage is formed such that a passage area thereof is increased toward the vaporized material discharge port from the liquid material introduction port. |
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