RAMAN SPECTROSCOPY ANALYSIS METHOD AND MICROSCOPIC RAMAN SPECTROSCOPY DEVICE

[Problem to be solved] An object of the present invention is to provide a Raman spectroscopy analysis method that identifies the number of irradiation times of laser light at which a sample to be analyzed is damaged by the laser light during multiple Raman spectroscopy measurements and performs stru...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	HIRONO, Kohei, AOI, Yusuke
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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Beschreibung
Zusammenfassung:	[Problem to be solved] An object of the present invention is to provide a Raman spectroscopy analysis method that identifies the number of irradiation times of laser light at which a sample to be analyzed is damaged by the laser light during multiple Raman spectroscopy measurements and performs structural analysis of the sample to be analyzed using data on Raman scattering light obtained when the sample to be analyzed is in an undamaged state.[Solution] A Raman spectroscopy analysis method including: dispersing an obtained Raman scattering light; identifying an upper limit of the number of irradiation times at which the sample to be analyzed is not damaged from total scattering intensity in a specific wavenumber range, a ratio of the total scattering intensity in the specific wavenumber range for each time irradiation to the total scattering intensity in the specific wavenumber range for first time irradiation and a correlation coefficient; using Raman scattering light data up to the upper limit of the number of irradiation times.