SHOWERHEAD TO PEDESTAL GAPPING WITH DIFFERENTIAL CAPACITIVE SENSOR SUBSTRATE

A sensor disc configured to measure a gap between a first structure and a second structure in a processing chamber of a substrate processing system includes an upper surface, at least one first capacitive sensor arranged on the upper surface of the sensor disc that is configured to generate a first...

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Bibliographische Detailangaben
Hauptverfasser:	BLANK, Richard, HIESTER, Jacob L
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS METALLURGY PHYSICS SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TESTING
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Beschreibung
Zusammenfassung:	A sensor disc configured to measure a gap between a first structure and a second structure in a processing chamber of a substrate processing system includes an upper surface, at least one first capacitive sensor arranged on the upper surface of the sensor disc that is configured to generate a first measurement signal indicative of a first distance between the upper surface of the sensor disc and the first structure, a lower surface, and at least one second capacitive sensor arranged on the lower surface of the sensor disc that is configured to generate a second measurement signal indicative of a second distance between the lower surface of the sensor disc and the second structure.