VERTICALLY-ORIENTED COMPLEMENTARY TRANSISTOR

A semiconductor device according to the present disclosure includes a first transistor and a second transistor disposed over the first transistor. The first transistor includes a plurality of channel members vertically stacked over one another, and a first source/drain feature adjoining the pluralit...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Chuang, Chi-Yi, Chen, Hou-Yu, Cheng, Kuan-Lun
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A semiconductor device according to the present disclosure includes a first transistor and a second transistor disposed over the first transistor. The first transistor includes a plurality of channel members vertically stacked over one another, and a first source/drain feature adjoining the plurality of channel members. The second transistor includes a fin structure, and a second source/drain feature adjoining the fin structure. The semiconductor device further includes a conductive feature electrically connecting the first source/drain feature and the second source/drain feature.