METHOD OF FABRICATING A FINFET DEVICE

In an embodiment, a device includes a first active region over a substrate, a portion of the first active region having a first surface, the first surface defining a channel and being a first distance from the substrate. A dummy structure is adjacent to the first active region and has a sidewall ext...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Ting, Kuo-Chiang, Chen, Kuang-Hsin, Wu, Chi-Hsi, Yin, Joanna Chaw Yane
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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