CRUCIBLE COMBINATION AND THERMAL FIELD ASSEMBLY

Provided are a crucible combination and a thermal field assembly. The crucible combination includes a susceptor holder; a susceptor body disposed on the susceptor holder, the susceptor body comprises a crucible installation cavity that gradually increases from the susceptor holder in a direction dep...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HAN, Wei, LI, Qiao, REN, Weikang, ZHAO, Linghang, DU, Lulu, YAO, Hong, CHENG, Lu, DUAN, Bin, ZHANG, Chaoguang, DENG, Hao, CHENG, Lei
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Provided are a crucible combination and a thermal field assembly. The crucible combination includes a susceptor holder; a susceptor body disposed on the susceptor holder, the susceptor body comprises a crucible installation cavity that gradually increases from the susceptor holder in a direction departing from the susceptor holder; and a crucible disposed in the crucible installation cavity, an outer surface of the crucible is an outer surface that gradually increases from the susceptor holder in the direction departing from the susceptor holder, the outer surface and an inner surface of the crucible installation cavity are arranged oppositely, and a softening temperature of the susceptor body is greater than the softening temperature of the crucible.