PROCESSING METHOD AND PROCESSING APPARATUS FOR WORKPIECE

A processing method for a workpiece includes applying to the workpiece a pulsed laser beam that causes ablation to thereby generate plasma light and generate a first distribution pattern, the beam having a wavelength and intensity of light intrinsic to the workpiece substance, the beam being used to...

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Bibliographische Detailangaben
Hauptverfasser: HIROSE, Tsubasa, MORIKAZU, Hiroshi
Format: Patent
Sprache:eng
Schlagworte:
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