DETECTOR INSPECTION DEVICE, DETECTOR ASSEMBLY, DETECTOR ARRAY, APPARATUS, AND METHOD

DETECTOR INSPECTION DEVICE, DETECTOR ASSEMBLY, DETECTOR ARRAY, APPARATUS, AND METHOD

The embodiments of the present disclosure provides a detector inspection device for interrogating at least part of a detector comprised in a charged particle-optical assessment apparatus, the detector inspection device comprising: a coupler configured to be positioned proximate to a detector element...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: RODRIGUES MANSANO, Andre Luis, VAN LEEUWEN, Richard Michel, SEEKLES, Duije, LOOIJE, Alexius Otto, WIELAND, Marco Jan-Jaco, VAN T VEEN, Gretchen Renée, MARISSEN, Roelof Albert, STEENSTRA, Herre Tjerk, VISSER, Erwin Robert Alexander
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Beschreibung
Zusammenfassung:The embodiments of the present disclosure provides a detector inspection device for interrogating at least part of a detector comprised in a charged particle-optical assessment apparatus, the detector inspection device comprising: a coupler configured to be positioned proximate to a detector element of a detector; and a device controller configured to apply a stimulating signal to the coupler to stimulate a response signal in the detector for interrogating at least part of the detector.