LASER-TREATED ANTI-DEPOSITION OBJECT AND MANUFACTURING METHOD OF THE SAME

Disclosed are a laser-treated anti-deposition object with a main structure and a fluorine coating layer and a manufacturing method of the same. The fluorine coating layer covers a laser-treated surface of the main structure to form an anti-deposition surface, an initial surface of the main structure...

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Bibliographische Detailangaben
Hauptverfasser: CHEN, CHIEN-HSUN, CHANG, CHIENNG, FANG, CHIHIANG, LU, HE-PU
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Disclosed are a laser-treated anti-deposition object with a main structure and a fluorine coating layer and a manufacturing method of the same. The fluorine coating layer covers a laser-treated surface of the main structure to form an anti-deposition surface, an initial surface of the main structure is subjected to a laser surface treatment step by a laser to become the laser-treated surface with a plurality of microstructures. The anti-deposition object contacts with a manufacturing process substance used or discharged during a manufacturing process performed by a manufacturing process equipment in a vacuum environment, and the anti-deposition surface of the object has a relatively high contact angle.