LIGHT EMITTING ELEMENT AND PRODUCTION METHOD THEREFOR

LIGHT EMITTING ELEMENT AND PRODUCTION METHOD THEREFOR

A method for producing a light emitting element, includes: stacking an n layer, a light emitting layer, and a p layer in this order, on a substrate; forming a hole having a depth reaching the n layer at a predetermined region of a surface of the p layer; forming, over the p layer, a p electrode havi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: OMOYA, Hideki, MAKINO, Hiroaki, MATSUI, Shinichi, MIZUTANI, Koichi
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A method for producing a light emitting element, includes: stacking an n layer, a light emitting layer, and a p layer in this order, on a substrate; forming a hole having a depth reaching the n layer at a predetermined region of a surface of the p layer; forming, over the p layer, a p electrode having a Ru layer in contact with the p layer; forming an n electrode as defined herein; and performing a heat treatment as defined herein to reduce a contact resistance of the p electrode and the n electrode and to activate a p-type impurity in the p layer, and a pattern of the hole and a pattern of the p electrode are set such that a proportion of an area of the p electrode to a total area of the hole and the p layer is 70% or more.