MEMORY ARRAYS COMPRISING OPERATIVE CHANNEL-MATERIAL STRINGS AND DUMMY PILLARS

A memory array comprising strings of memory cells comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers. Operative channel-material strings of memory cells extend through the insulative tiers and the conductive...

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Bibliographische Detailangaben
Hauptverfasser: Blomme, Pieter, Dorhout, Justin B, Machkaoutsan, Vladimir, Camerlenghi, Emilio, Li, Jian, Meyer, Ryan L, Tessariol, Paolo
Format: Patent
Sprache:eng
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Zusammenfassung:A memory array comprising strings of memory cells comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers. Operative channel-material strings of memory cells extend through the insulative tiers and the conductive tiers. First dummy pillars in the memory blocks extend through at least a majority of the insulative tiers and the conductive tiers through which the channel-material strings extend. Second pillars dummy are laterally-between and longitudinally-spaced-along immediately-laterally-adjacent of the memory blocks. The second dummy pillars extend through at least a majority of the insulative tiers and the conductive tiers through which the operative channel-material strings extend laterally-between the immediately-laterally-adjacent memory blocks. Other embodiments, including method, are disclosed.