MASS SPECTROMETER
A mass spectrometer includes a beam irradiator configured to emit an ion beam with pulses to irradiate a beam irradiation region along a surface of a sample; a laser irradiator configured to emit laser light with pulses to irradiate a laser irradiation region above the sample; a mass spectrometry un...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A mass spectrometer includes a beam irradiator configured to emit an ion beam with pulses to irradiate a beam irradiation region along a surface of a sample; a laser irradiator configured to emit laser light with pulses to irradiate a laser irradiation region above the sample; a mass spectrometry unit configured to detects a mass of ion particles released from the sample by the ion beam and ionized by the laser light; and a controller. The controller is configured to: adjust a position of the laser irradiation region; and adjust the position of the laser irradiation region for each irradiation interval of the laser light. |
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