ELECTRON MICROSCOPE AND CRYSTAL EVALUATION METHOD

An electron microscope includes an electron beam irradiation unit, a subject holding unit that has a subject installation surface, and a second detection unit that detects an EBSD image. In addition, the electron microscope includes an SEM control unit that controls an operation of the subject holdi...

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Bibliographische Detailangaben
Hauptverfasser: OTSUKA, Yuki, AKUTSU, Haruko, HOSHINO, Ken
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An electron microscope includes an electron beam irradiation unit, a subject holding unit that has a subject installation surface, and a second detection unit that detects an EBSD image. In addition, the electron microscope includes an SEM control unit that controls an operation of the subject holding unit, and an EBSD analysis unit that analyzes a crystal structure of a subject based on the EBSD image. The subject holding unit is rotatable around an axis parallel to a direction of irradiation with an electron beam, and is configured such that the subject installation surface is inclinable with respect to a plane perpendicular to the direction of irradiation with the electron beam. The EBSD analysis unit has an MAD value calculation unit that calculates a degree of similarity between the EBSD image and a reflector, and the SEM control unit controls a rotation operation or an inclination operation of the subject holding unit based on the degree of similarity.