SEMICONDUCTOR STORAGE DEVICE

According to one embodiment, in a semiconductor storage device, a plurality of second pillars each includes a first sub-pillar that is a single substance of a first insulating layer extending in the stacking direction in a lower layer side of a stacked body and a second sub-pillar arranged at a heig...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: WATARAI, Ayumi, TASHIRO, Kenji, NODA, Kosei
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:According to one embodiment, in a semiconductor storage device, a plurality of second pillars each includes a first sub-pillar that is a single substance of a first insulating layer extending in the stacking direction in a lower layer side of a stacked body and a second sub-pillar arranged at a height position in an upper layer side of the stacked body to correspond to the first sub-pillar. The second sub-pillar includes a semiconductor layer extending in the stacking direction at the height position in the upper layer side of the stacked body, a second insulating layer covering a sidewall of the semiconductor layer, a third insulating layer covering a sidewall of the second insulating layer, and a fourth insulating layer that includes a different material from the second and third insulating layers and is interposed between the second and third insulating layers.