APPARATUS AND METHOD FOR PRODUCING 3N OR HIGHER PURITY SILICON BY PURIFYING 2N PURITY SILICON
The present invention relates to an apparatus for producing 3N purity silicon by purification of 2N purity silicon, the purification including the steps of air injection (E1), filtering (E2) and solidification (E3) to obtain 3N purity silicon in the solid state.
Gespeichert in:
Hauptverfasser: | , , |
---|---|
Format: | Patent |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | The present invention relates to an apparatus for producing 3N purity silicon by purification of 2N purity silicon, the purification including the steps of air injection (E1), filtering (E2) and solidification (E3) to obtain 3N purity silicon in the solid state. |
---|