PATTERNED CONDUCTIVE ARTICLE

A patterned conductive article includes a substrate having a first groove therein; a conductive seed layer disposed in the first groove; and a unitary conductive body disposed at least partially in the first groove. The conductive seed layer covers at least a majority of a bottom surface of the firs...

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Bibliographische Detailangaben
Hauptverfasser: Johnston, Raymond P, Abraham, Gregory L, Meyer, Kenneth A.P, Sullivan, John J, Zhang, Haiyan, Stay, Matthew S, Gotrik, Kevin W, Carls, Joseph C
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A patterned conductive article includes a substrate having a first groove therein; a conductive seed layer disposed in the first groove; and a unitary conductive body disposed at least partially in the first groove. The conductive seed layer covers at least a majority of a bottom surface of the first groove, and the unitary conductive body covers the conductive seed layer and at least a majority of side surfaces of the first groove. In a plane through the unitary conductive body that is parallel to and separate from the conductive seed layer, the unitary conductive body has a lower first line edge roughness at a first interface with the side surfaces and the conductive seed layer has a higher second line edge roughness at an edge of the conductive seed layer.