Masking Techniques for Memory Applications

Various implementations described herein are related to a device including a bitcell having a bitcell layout with a first metal layer, a second metal layer and a via programming layer. The device may have a via marking layer provided in the bitcell layout for the bitcell, and the via marking layer c...

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Bibliographische Detailangaben
Hauptverfasser: Asthana, Vivek, Vial, Jean-Christophe, Amirante, Ettore, Chong, Yew Keong
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Various implementations described herein are related to a device including a bitcell having a bitcell layout with a first metal layer, a second metal layer and a via programming layer. The device may have a via marking layer provided in the bitcell layout for the bitcell, and the via marking layer controls optical proximity correction of the first metal layer and the second metal layer.