PARTICLE BEAM MICROSCOPE

PARTICLE BEAM MICROSCOPE

A particle beam microscope comprises: a particle beam source for generating a particle beam; an objective lens for focusing the particle beam in an object plane; a first scintillator for converting electrons into light; a second scintillator for generating light by way of electrons; and light detect...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Preikszas, Dirk, Essers, Erik
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
MEASUREMENT OF NUCLEAR OR X-RADIATION
MEASURING
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:A particle beam microscope comprises: a particle beam source for generating a particle beam; an objective lens for focusing the particle beam in an object plane; a first scintillator for converting electrons into light; a second scintillator for generating light by way of electrons; and light detectors for detecting the generated light. The distance of second scintillator from the object plane is greater than the distance of the first scintillator from the object plane. The second scintillator has a surface which faces the object plane and through which electrons arriving from the object plane pass. The electrons are converted into light by the second scintillator. The light generated by the first scintillator and detected by a light detector is incident on the second scintillator.