SEMICONDUCTOR ON INSULATOR WAFER WITH CAVITY STRUCTURES

The present disclosure relates to semiconductor structures and, more particularly, to a semiconductor on insulator substrate with cavity structures and methods of manufacture. The structure includes: a bulk substrate with at least one rectilinear cavity structure; an insulator material sealing the a...

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Bibliographische Detailangaben
Hauptverfasser: ELLIS-MONAGHAN, John J, PORTH, Bruce W, ADUSUMILLI, Siva P, STAMPER, Anthony K
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The present disclosure relates to semiconductor structures and, more particularly, to a semiconductor on insulator substrate with cavity structures and methods of manufacture. The structure includes: a bulk substrate with at least one rectilinear cavity structure; an insulator material sealing the at least one rectilinear cavity structure; and a buried insulator layer on the bulk substrate and over the at least one rectilinear cavity structure.