SYSTEMS AND METHODS FOR ACCURATE LAYER DETECTION AND ANALYSIS IN CHARGED PARTICLE MICROSCOPES

Embodiments of the present disclosure enable identification, labeling, and isolation of a specific layer within a complex, three-dimensional structure such as a semiconductor memory structure. In particular, the systems and methods described herein can identify a specific layer such as a wordline in a multi-layer structure having periodic or repeated layers for subsequent isolation and analysis. The present disclosure enables automation of layer counting and marking within the multi-layer structure such that a specific desired layer within the multi-layer structure can be isolated and analyzed.