OPTICAL DETECTION DEVICE, MANUFACTURING METHOD OF OPTICAL DETECTION DEVICE, AND ELECTRONIC APPARATUS
An optical detection device including a through electrode is provided. The optical detection device includes a first semiconductor layer having a photoelectric conversion region, a first surface, and a second surface that is a light entrance surface, a second semiconductor layer with a third surface...
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| creator | OINOUE, Takashi HANEDA, Masaki SHIRASU, Yoshiki FUJII, Yosuke SAITO, Suguru OHSHIMA, Keiji KUROTORI, Takuya SUGIYAMA, Tomohiro SHIMOMURA, Kazuki FUJII, Nobutoshi TOKUOKA, Kenichi HIRANO, Takaaki ISHIMARU, Toshiyuki MITSUHASHI, Ikue KOTOO, Kengo IMAI, Shinichi |
| description | An optical detection device including a through electrode is provided. The optical detection device includes a first semiconductor layer having a photoelectric conversion region, a first surface, and a second surface that is a light entrance surface, a second semiconductor layer with a third surface and a fourth surface, a second wiring layer overlapped with the third surface, a third wiring layer overlapped with the fourth surface, a first wiring layer with one surface overlapped with the first surface and another surface overlapped with one of the second wiring layer and the third wiring layer, a first conductor that has a first width, includes a first material, and penetrates the second semiconductor layer in a thickness direction, and a second conductor that has a second width smaller than the first width, includes a second material different from the first material, and penetrates the second semiconductor layer in the thickness direction. |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
| title | OPTICAL DETECTION DEVICE, MANUFACTURING METHOD OF OPTICAL DETECTION DEVICE, AND ELECTRONIC APPARATUS |
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