MICROSCANNER HAVING MEANDER SPRING-BASED MIRROR SUSPENSION

A microscanner for projecting electromagnetic radiation onto an observation field comprises: a deflection element having a mirror surface designed as a micromirror for deflecting an incident electromagnetic beam; a support structure that surrounds the deflection element at least in some sections; an...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: VON WANTOCH, Thomas, HOFMANN, Ulrich, SCHWARZ, Fabian
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:A microscanner for projecting electromagnetic radiation onto an observation field comprises: a deflection element having a mirror surface designed as a micromirror for deflecting an incident electromagnetic beam; a support structure that surrounds the deflection element at least in some sections; and a spring device having a plurality of springs. By means of the springs, the deflection element is suspended on the support structure in an oscillating manner in such a way that it can simultaneously carry out a first rotational oscillation around a first oscillation axis and a second rotational oscillation around a second oscillation axis orthogonal thereto relative to the support structure, in order to be able to effectuate a Lissajous projection in an observation field by reflection of an electromagnetic beam incident on the deflection element during the simultaneous oscillations. At least one of the springs comprises a spring section which is designed as a meander spring having a sequence of two or more meanders which follow one another along its longitudinal direction and extend transversely thereto. The spring section is arranged within a space between the deflection element and the support structure and is guided with its longitudinal direction along a line which deviates from a radial direction in relation to the geometric center point of the micromirror.