PRESSURE SENSOR WITH CONTACT DETECTION OF THE DEFLECTION OF THE MEMBRANE, PRESSURE SENSOR SYSTEM AND METHOD FOR GENERATING A PRESSURE SIGNAL

A micromechanical pressure sensor element as well as a pressure sensing system comprising such a pressure sensor element, with which the pressure sensor element establishes an electrical contact in the event of a specified first pressure being applied. The pressure sensor element has a membrane that...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Kreutzer, Joachim, Dannenberg, Arne, Slogsnat, David
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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