PRESSURE SENSOR WITH CONTACT DETECTION OF THE DEFLECTION OF THE MEMBRANE, PRESSURE SENSOR SYSTEM AND METHOD FOR GENERATING A PRESSURE SIGNAL
A micromechanical pressure sensor element as well as a pressure sensing system comprising such a pressure sensor element, with which the pressure sensor element establishes an electrical contact in the event of a specified first pressure being applied. The pressure sensor element has a membrane that...
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Sprache: | eng |
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Zusammenfassung: | A micromechanical pressure sensor element as well as a pressure sensing system comprising such a pressure sensor element, with which the pressure sensor element establishes an electrical contact in the event of a specified first pressure being applied. The pressure sensor element has a membrane that can be moved or deflected by an applied pressure. A first cavity into which the membrane can be deflected is provided below the membrane. Two contact elements are provided which come into contact with each other, in particular via a mechanical contact, on the basis of a first applied pressure being exceeded so that an electric contact is established. At least one first contact element, which is directly or indirectly connected to the membrane, and a second contact element, which is directly or indirectly connected to the cavity bottom, are provided. |
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