ANGULAR RATE SENSORS

A micro-electromechanical sensor, MEMS, device for measuring z-axis angular rate, the device comprising: a substrate defining a substrate plane and a z-axis perpendicular to the substrate plane; a first vibratory structure comprising a first proof mass and a second proof mass; a second vibratory structure comprising a first sense mass and a second sense mass, the first and second proof masses each respectively having first and second drive structures comprising first and second drive masses, respectively, said drive structures for generating drive-mode movements of said proof masses in drive-mode direction (x), the drive mode corresponding to the anti-phase movement of said proof masses; wherein the first and second vibratory structures being elastically coupled to each other, the device further comprising a mechanical structure for amplifying a Coriolis-induced movement in the sense mode direction (y) of said proof masses and for converting said amplified Coriolis induced movement into movement of the sense masses in the drive-mode direction (x), wherein the in-phase sense movement of said proof masses is suppressed, the mechanical structure comprising a lever pivotable about the z-axis and a mechanical decoupler for decoupling the drive and sense modes.