Superalloy Target

A superalloy target wherein the superalloy target has a polycrystalline structure of random grain orientation, the average grain size in the structure is smaller than 20 μm, and the porosity in the structure is smaller than 10%. Furthermore, the invention includes a method of producing a superalloy...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: RAMM, Jurgen, POLCIK, Peter
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A superalloy target wherein the superalloy target has a polycrystalline structure of random grain orientation, the average grain size in the structure is smaller than 20 μm, and the porosity in the structure is smaller than 10%. Furthermore, the invention includes a method of producing a superalloy target by powder metallurgical production, wherein the powder-metallurgical production starts from alloyed powder (s) of a superalloy and includes the step of spark plasma sintering (SPS) of the alloyed powder (s).