SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

A semiconductor device includes electrode layers and first insulating films alternately stacked on top of one another; a second insulating film extending along an upper surface, a lower surface, and a side surface of one of electrode layers; a charge storage layer extending along a side surface of t...

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Bibliographische Detailangaben

Hauptverfasser:	NOGUCHI, Masaki, UMEDA, Chihiro, IINO, Tomohisa, NAKAJIMA, Yusuke, KAMIYA, Yuta, TAKASHIMA, Akira
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRICITY
Online-Zugang:	Volltext bestellen
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