INCLINE ESTIMATION SYSTEM, INCLINE ESTIMATION METHOD, INCLINE ESTIMATION PROGRAM, SEMICONDUCTOR INSPECTION SYSTEM, AND ORGANISM OBSERVATION SYSTEM

An inclination estimation system is a system for estimating the inclination of an imaging target captured in an image, and includes: an estimation target image acquisition unit for acquiring estimation target images from the image; a focal position estimation unit for outputting feature quantities f...

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Hauptverfasser: TAKESHIMA, Tomochika, ITO, Akari
Format: Patent
Sprache:eng
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Zusammenfassung:An inclination estimation system is a system for estimating the inclination of an imaging target captured in an image, and includes: an estimation target image acquisition unit for acquiring estimation target images from the image; a focal position estimation unit for outputting feature quantities from estimation target images by using a feature quantity output model and estimating focal positions when in focus corresponding to the estimation target images; and an inclination estimation unit for estimating the inclination of the imaging target from the focal positions when in focus, wherein the feature quantity output model is generated by machine learning from a learning images associated with focal position information, and feature quantities of two different learning images are compared with each other according to focal position information associated with the two different learning images, and machine learning is performed based on a result of the comparison.