IN-LINE MACHINE VISION SYSTEM FOR PART TRACKING OF SUBSTRATE PROCESSING SYSTEM

Systems for tracking consumable parts in a substrate processing system includes a mounting enclosure with a consumable parts station used for storing consumable parts within. The mounting enclosure has an opening toward an EFEM to enable a robot of the EFEM to retrieve a consumable part from the consumable parts station. An image capture system is configured to capture an image of a code on the consumable part. The image capture system includes a camera and a light source. The image capture system is positioned near the opening of the mounting enclosure, such that the camera and the light source are pointed toward the opening. A processor is communicatively connected to the image capture system and to a controller. The controller causes the robot to move the consumable part from the consumable parts station via the opening and to position the code on the consumable part within a field of view of the image capture system. The controller issues a command to the processor to activate the light source and the camera to capture an image of the code, process the image, generate an identifier of the consumable part and forward the identifier to the controller. The controller is configured to use the identifier to verify that the consumable part is suitable for a subsequent operation.