FLUID DEVICE
A fluid device includes a chamber that is provided with an inlet and an outlet opened at different positions on an X axis and is formed with a flow path space in which a fluid is caused to flow from the inlet to the outlet, a first ultrasonic element configured to generate a standing wave in a direc...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A fluid device includes a chamber that is provided with an inlet and an outlet opened at different positions on an X axis and is formed with a flow path space in which a fluid is caused to flow from the inlet to the outlet, a first ultrasonic element configured to generate a standing wave in a direction along an X axis in the fluid in the chamber, a driver configured to drive the first ultrasonic element, and a drive controller configured to control the driver such that a drive voltage applied to the first ultrasonic element is reduced over time. |
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