SEMICONDUCTOR MEMORY DEVICE

There are provided a semiconductor memory device and a manufacturing method of a semiconductor memory device. The semiconductor memory device includes: a plurality of conductive layers stacked to be spaced apart from each other in a first direction; a channel hole extending in the first direction to...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CHOI, Won Geun, JANG, Jung Shik, CHOI, Jung Dal, PARK, In Su, PARK, Mi Seong
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:There are provided a semiconductor memory device and a manufacturing method of a semiconductor memory device. The semiconductor memory device includes: a plurality of conductive layers stacked to be spaced apart from each other in a first direction; a channel hole extending in the first direction to penetrate the plurality of conductive layers; two or more channel patterns disposed to be spaced apart from each other along a sidewall of the channel hole; and two or more memory patterns disposed to be spaced apart from each other between the sidewall of the channel hole and the two or more channel patterns, respectively.