SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

A semiconductor device includes a supporter including a plurality of stairs, a gate structure including gate lines that are stacked on the supporter, wherein the gate lines include pads, and the pads are disposed over the plurality of stairs, first contact plugs that are connected to the pads, and c...

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Hauptverfasser: CHOI, Won Geun, JANG, Jung Shik, KWAK, Rho Gyu, CHOI, Jung Dal, CHOI, Seok Min, PARK, In Su
Format: Patent
Sprache:eng
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ELECTRICITY
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creator CHOI, Won Geun
JANG, Jung Shik
KWAK, Rho Gyu
CHOI, Jung Dal
CHOI, Seok Min
PARK, In Su
description A semiconductor device includes a supporter including a plurality of stairs, a gate structure including gate lines that are stacked on the supporter, wherein the gate lines include pads, and the pads are disposed over the plurality of stairs, first contact plugs that are connected to the pads, and channel structures that extend through the gate structure.
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title SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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