SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

A semiconductor device includes a supporter including a plurality of stairs, a gate structure including gate lines that are stacked on the supporter, wherein the gate lines include pads, and the pads are disposed over the plurality of stairs, first contact plugs that are connected to the pads, and c...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CHOI, Won Geun, JANG, Jung Shik, KWAK, Rho Gyu, CHOI, Jung Dal, CHOI, Seok Min, PARK, In Su
Format: Patent
Sprache:eng
Schlagworte:
ELECTRICITY
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Beschreibung
Zusammenfassung:A semiconductor device includes a supporter including a plurality of stairs, a gate structure including gate lines that are stacked on the supporter, wherein the gate lines include pads, and the pads are disposed over the plurality of stairs, first contact plugs that are connected to the pads, and channel structures that extend through the gate structure.