METHOD OF MANUFACTURING SEMICONDUCTORS USING FLUID DELIVERY SYSTEM

A method of manufacturing a substrate block for a fluid delivery system is disclosed. First, a mold is provided, the mold having a cavity. The cavity of the mold is filled with a fluoropolymer to form a substrate block having an upper surface. A curved insert is withdrawn from the cavity to form a s...

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Bibliographische Detailangaben
Hauptverfasser:	KUBOTA, Haruyuki, MELCER, Chris, TREUR, Randolph, BARROS, Philip Ryan, CUSHMAN, Todd Mark
Format:	Patent
Sprache:	eng
Schlagworte:	ACTUATING-FLOATS BASIC ELECTRIC ELEMENTS BLASTING COCKS CYLINDERS DEVICES FOR VENTING OR AERATING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING JOINTS OR FITTINGS FOR PIPES LIGHTING MEANS FOR THERMAL INSULATION IN GENERAL MECHANICAL ENGINEERING PIPES PISTONS SEALINGS SEMICONDUCTOR DEVICES SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING TAPS THERMAL INSULATION IN GENERAL VALVES WEAPONS
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Beschreibung
Zusammenfassung:	A method of manufacturing a substrate block for a fluid delivery system is disclosed. First, a mold is provided, the mold having a cavity. The cavity of the mold is filled with a fluoropolymer to form a substrate block having an upper surface. A curved insert is withdrawn from the cavity to form a substrate fluid passageway extending from an inlet substrate port to an outlet substrate port. The substrate fluid passageway extends between the inlet substrate port and the outlet substrate port in a smooth arc free of corners or angular walls.