STRAIN GAUGE AND LOAD CELL

The present strain gauge is a strain gauge installed on a Roberval-type strain generator, and includes a substrate having flexibility; and a resistor formed of a film that contains Cr, CrN, and Cr2N over the substrate, wherein a film thickness of the resistor is greater than or equal to 6 nm and les...

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Bibliographische Detailangaben
Hauptverfasser:	YUGUCHI, Akiyo, ONO, Aya, KITAMURA, Atsushi, OGASA, Yosuke, ASAKAWA, Toshiaki
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING WEIGHING
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Beschreibung
Zusammenfassung:	The present strain gauge is a strain gauge installed on a Roberval-type strain generator, and includes a substrate having flexibility; and a resistor formed of a film that contains Cr, CrN, and Cr2N over the substrate, wherein a film thickness of the resistor is greater than or equal to 6 nm and less than or equal to 100 nm.