MONITORING A FLAME TREATMENT DEVICE

The present invention relates very generally to the monitoring of a flame treatment device and in particular to a substrate treatment system having a flame treatment device and first and second substrate monitoring units.

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: HÖPFNER, Kathrin, BRECHTL, Giani, RÜBSAM, Felix, RÜTH, Edgar
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The present invention relates very generally to the monitoring of a flame treatment device and in particular to a substrate treatment system having a flame treatment device and first and second substrate monitoring units.