PROCESSING APPARATUS AND ELECTRONIC COMPONENT MANUFACTURING METHOD

A processing apparatus includes a rotatable blade, a blade driving shaft, a table, a position driving mechanism, a first sensor, a second sensor, a start/stop point information extraction section, a characteristic-vibration-information extraction section, and a characteristic-vibration-information e...

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Bibliographische Detailangaben
Hauptverfasser:	HORAI, Takashi, NONAKA, Atsuhiro, KITAMURA, Tomoko
Format:	Patent
Sprache:	eng
Schlagworte:	CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PERFORMING OPERATIONS PHYSICS REGULATING TRANSPORTING WORKING CEMENT, CLAY, OR STONE WORKING STONE OR STONE-LIKE MATERIALS
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Beschreibung
Zusammenfassung:	A processing apparatus includes a rotatable blade, a blade driving shaft, a table, a position driving mechanism, a first sensor, a second sensor, a start/stop point information extraction section, a characteristic-vibration-information extraction section, and a characteristic-vibration-information extraction section. The shaft drives the blade. The table places a workpiece to be processed. The mechanism changes a relative position between the blade and the workpiece. The first sensor detects a vibration generated by driving the blade. The second sensor detects a vibration generated by driving the blade. The start/stop point information extraction section extracts at least one of a start point information regarding a contact start point and a stop point information regarding a contact stop point based on a detection result of the second sensor. The characteristic-vibration-information extraction section extracts a characteristic vibration information regarding a predetermined characteristic vibration and determines a position of the characteristic vibration.