METHOD FOR MANUFACTURING ACOUSTIC WAVE ELEMENT AND ACOUSTIC WAVE ELEMENT

A method for manufacturing an acoustic wave element including a support substrate, a piezoelectric material layer on the support substrate, and a functional electrode on the piezoelectric material layer, includes preparing a wafer in which the support substrate and the piezoelectric material layer a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JONOSONO, Shinya, NODAKE, Naohiro, INOUE, Kazunori, YAMANE, Takashi, KUBO, Shintaro
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRONIC CIRCUITRY CLADDING OR PLATING BY SOLDERING OR WELDING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING ELECTRICITY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS RESONATORS SOLDERING OR UNSOLDERING TRANSPORTING WELDING WORKING BY LASER BEAM
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