MASK CASE, MASK HANDLING AUTOMATION APPARATUS AND OPERATING METHOD THEREOF

A mask case includes a lower case including a first side surface and a second side surface opposite each other, a first rail on the first side surface, and a second rail on the second side surface, an upper case separable from the lower case, and includes third and fourth side surfaces corresponding...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KIM, Sang Min, BYUN, Jae Sung, CHANG, Jun Hyuk, LEE, Hyun Woo, YU, Sang Yong, JEONG, Yun Song
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A mask case includes a lower case including a first side surface and a second side surface opposite each other, a first rail on the first side surface, and a second rail on the second side surface, an upper case separable from the lower case, and includes third and fourth side surfaces corresponding to the first and second side surfaces, a third rail on the third side, and a fourth rail on the fourth side, a first sliding lock member slidable along the first and third rails, and a second sliding lock member slidable along the second and fourth rails, first and second holes for coupling first and second pins of first and second locking open and close devices are in the first and second sliding lock members, and the first and second sliding lock members are slid by the first and second locking open and close devices.