PARYLENE COATING SYSTEM

A parylene coating system comprising a single welded reaction and chamber assembly is disclosed, the welded reaction and chamber assembly comprising a reaction zone having a vaporizer and a pyrolysis zone, the vaporizer including a body with one or more openings and a loading door; a deposition cham...

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Bibliographische Detailangaben
Hauptverfasser:	Behne, Brian J, Swanson, II, Michael Todd, Neely, Steven Scott, Gillette, Bradford Alan
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY CLADDING OR PLATING BY SOLDERING OR WELDING COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR METALLURGY PERFORMING OPERATIONS SOLDERING OR UNSOLDERING SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING WELDING WORKING BY LASER BEAM
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Beschreibung
Zusammenfassung:	A parylene coating system comprising a single welded reaction and chamber assembly is disclosed, the welded reaction and chamber assembly comprising a reaction zone having a vaporizer and a pyrolysis zone, the vaporizer including a body with one or more openings and a loading door; a deposition chamber for holding one or more specimens and having an inlet, an outlet, a lid, and at least one view port; wherein the pyrolysis zone is positioned between the vaporizer and the deposition chamber and welded at a first end to the vaporizer using a first weldment and at a second, opposing end to the inlet of the chamber using a second weldment. The parylene coating system further comprises a pumping system coupled to the outlet of the chamber and configured to reduce an internal pressure of the assembly to within a target pressure range for parylene deposition.